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Matching parameter estimation for high power Inductively coupled plasma sources using Machine learning techniques

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Himanshu Tyagi, Joshi, Manjunath V, Mainak Bandyopadhyay, M.J. Singh, Kaushal Pandya, and Arun Chakraborty, "Matching parameter estimation for high power Inductively coupled plasma sources using Machine learning techniques," Fusion Engineering and Design, Elsevier, ISSN: 0920-3796, vol. 208, Nov. 2024, article no. 114675, doi: 10.1016/j.fusengdes.2024.114675.

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